Cat. No.: SC6.2
Manually Controlled
Cold deposition/etch system for
SEM sample preparation
$8,450.00 |
|
The Hummer™ 6.2 performs sputter coating, a cold process in which ions impacting a metal
source dislodge metal atoms. The atoms disperse throughout the process chamber to uniformly coat irregularly shaped specimens without thermal damage. Sputter coating produces high
quality coatings whose thickness is repeatable and easily controlled. Cold, fast sputter rates require less time, giving you more time for microscope examinations.Built-in Flexibility:
Etch mode allows the Hummer to gently clean specimens, removing non-bonded surface material to provide a clean surface for better sputtered atom adhesion.
Debris etched from the sample is attracted to the dark space shield around the sample stage, away from the sample and precious metal source. Plasma mode
is used to outgas and clean materials. In this mode, alternating current excites gas molecules to remove small amounts of
organic or volatile contaminants from sample surfaces, and to cross-link organic specimens. Pulse deposition mode switches high voltage on and off every five seconds. This allows
re-nucleation of deposited material, and heat rise is kept under 2 degrees C at the sample. Standard Features:
- Grain size of less than 2 nanometers for SEM preparation.
- Magnetically enhanced sputter head minimizes sample heating.
- Automatic slow venting at termination of process.
- Sample stage accommodates up to 3" diameter substrates or 12 SEM stubs. Stage adjusts 2" vertically.
- Self-contained two stage direct drive rotary pump assures rapid pump down. Requires less lab space than systems with remote pumps.
- Easy access to pump oil fill and drain ports simplify maintenance.
- Chamber dimensions - 4" diameter x 6" high
- Vacuum to 30 millitorr.
- Three modes - Plate mode, Etch mode (Al etch ring included) and Plasma Mode.
- Includes target of choice.
Plating With a Hummer. Depending on the metal source installed, Hummers can deposit thin films of gold, gold/palladium, silver, platinum and other metals. To use a different metal source,
simply pull out one and push in another. The Hummer top plate lifts off for easy sample loading and retrieval. The stage accepts all kinds of SEM stubs. A magnet inside the metal source ring
and a dark space shield eliminate heating by deflecting electrons away from the specimen. The cool, omnidirectional shower of secondary ions and neutrals produces finer grain deposits than
thermal coating processes. When processing is finished, a solenoid controlled vent valve slowly brings the process chamber to atmospheric pressure, preventing turbulence. This also assures
that oil cannot migrate from pump to process chamber, as can happen with manually vented systems. Rugged, Reliable Design. Hummer systems are built to deliver many years of faithful
service. Each Hummer is totally enclosed in a single cabinet, so it occupies less space and produces less noise than systems with remote pumps. Vacuum pump is near the process
chamber, for fast pump down. Vacuum connections are made and checked for leakage during manufacture, assuring vacuum integrity and allowing you to start working sooner because little
assembly is required. Safety interlocks protect both operator and equipment. A full line of spare parts is available for product maintenance. Options:
- Wide selection of targets made from precious metals.
- Carbon evaporation accessory for producing conductive coatings on samples for x-ray studies.
- Turbo-molecular pumping and sputter guns for chrome plating.
- RF option for sputtering insulators. This option will sputter nearly anything that can be formed into a target, including plastics, ceramics, glass and chromium. (Only available on Hummer 8)
Specifications:
- Power Consumption - 115 VAC, 60 Hz, 6 Amps or 220-225 VAC,
50 Hz, 3 Amps
- Power Output - 0-300 Volts, 0-30 milliamps
- Dimensions - 22" long x 20" wide x 22" high
- Shipping Weight - ~110 lbs.
Catalog
Number |
Description |
Price |
SC6.2
|
Hummer™ 6 Sputter Coater with 2 stage pump. Includes Gold or Gold/Palladium Target |
$8,450.00 |
SC6.2-220 |
Hummer™ 6 Sputter Coater with 2 stage pump. Includes Gold or Gold/Palladium Target- 220 Volt |
$8,800.00 |
SC6.2TR |
Same as SC6.2 but with a 6" x 8.375" chamber. Comes complete with a tilting rotary stage. There is no etch or plasma modes with this model. |
On Request |
30991 |
Carbon Evaporation Accessory for Hummer™ 6.2 & 8 Sputter Coaters. |
$3,650.00 |
DTMSC |
Digital Thickness Monitor for Hummer™ 6.2 & 8 Sputter Coaters. DTM installed at factory. For newly purchased sputter coaters only. |
$4,195.00 |
DTMSC-220 |
Digital Thickness Monitor for Hummer™ 6.2 & 8 Sputter Coaters. DTM installed at factory. For newly purchased sputter coaters only. |
$4,550.00 |
30996 |
Deposition Chamber for Hummer™ 6.2 Sputter Coater. |
On Request |
30TRS |
Tilting Rotary Stage for Hummer™ 6.2 & 8
Sputter Coaters. |
$2,495.00 |
Targets for the Hummer™ 6 and 8 may be found here. |
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