|
|
 |
52 Years of Quality and Innovation |
|
|
|
Catalog
Number |
Description |
Price |
SC6.2
|
Single head system for 3.5" substrates.
4" x 5" chamber. |
$8,450.00 |
SC6.2TR |
Same as 6.2 except with the tilt / rotate stage option. This option does not have the etch and plasma modes. Chamber size is 6" x 8.375". |
Call for price. |
SC6.6 |
SC6 with 8" x 8" cylinder and 6" stage for 4" wafers or substrates. |
$12,450.00 |
TSC6.6 |
Like SC6.6 but with turbo pump. For
sputtering noble metals only. |
On Request |
SC8 |
Three head system for wafers/substrates.
Chamber size 12" x 12". |
$20,850.00 |
TSC8 |
SC8 with turbo pump and DC power supply. Not for chrome sputtering. |
On Request |
TSC8C |
TSC8 for chrome sputtering. Has single DC sputter head and DC power supply. Requires water cooling for chrome sputtering.
Has 12" x 16" chamber. |
On Request |
TSC8RF |
RF sputtering system with turbo pump. Single high rate sputter source. For non-insulators, teflon, glass, plastics, etc. Has 12" x 16" chamber. |
On Request |
TSC8RFDC |
Combination RF/DC system with turbo pump. Single head. Second sputter source can be added for additional charge. Has 12" x 16" chamber. |
On Request |
WC |
Chiller/Recirculator |
On Request |
|
|
|
|
Ladd Sputter Coaters:
1. All have built-in mechanical pump.
2. Choice of targets is included. (one target per sputter head).
3. High wattage systems require a chiller/recirculator. |
|
